Field Emission Scanning Electron Microscope(S-4800)

　　FE-SEM is a microscope which tiny structures as small as 1 nanometer (= one millionth of a millimeter = 10^-9m!) can be visualize in small objects. S-4800 is Newly designed semi-in-lens system, it can achieve in-lens FE-SEM performance specifications. Observation for standard 6inch or (Optional) 8inch wafer is possible. Image observation is available by selecting secondary and/or backscatter electrons independently or by signal mixing through the use of the proprietary Hitachi super ExB energy filter system. Ultra low voltage imaging is available from 100V (Option)