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Multifunctional X-ray Photoelectron Spectroscopy

XPS is an extremely versatile system. It is equipped with two types of X-ray sources: the twin-anode (Mg/Al) and the twin crystal monochromatic Al source, producing spectra from areas ranging from 8 mm down to 20 mm in diameter. The use of the X-ray monochromator with small spot size allows selected area analysis. The lens and analyzer combination can also be operated at maximum sensitivity. This instrument is also able to produce elemental mapping with a spatial resolution of 1 mm. Other capabilities of the system include depth profiles, line scans, angle-resolved XPS and ion scattering (1 keV He+).